Power Semiconductors

Electron beam processing is a reliable and reproducible method for tailoring switching speeds and recovery time (lifetimes) of many silicon power semiconductor devices. The conventional competitive process used to control the lifetime of such devices is gold or platinum doping.

Electron beam vs. doping
Electron beam processing offers some important advantages over doping:

• The effects from electron beam can be reversed; but doping is irreversible.
• Electron beam is uniform and highly reproducible. Doping is sensitive to silicon defects that can hinder uniformity and reproducibility.
• Electron beam allows the ability to electrically measure lifetime before and after treatment. Doping takes place too early in the manufacturing process to allow such testing.
• With electron beam processing, it is possible to process not only wafers, but also final devices.

A pioneer in semiconductor processing
For over 25 years, Sterigenics Advanced Applications has been on the forefront of semiconductor processing. An example of that leadership is our exclusive – and patented – wafer carrier.

The carrier not only allows for the processing of stacks of wafers in a single run for cost effective processing, but also allows uniform dose absorption throughout the stacks and across the wafers.