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Power Semiconductors

Sterigenics – a pioneer in semiconductor processing

For nearly 40 years, Sterigenics Advanced Applications has been on the forefront of power semiconductor radiation processing to increase switching speed. An example of that leadership is our exclusive – and patented – wafer carrier, that not only allows for the processing of stacks of wafers in a single run for cost effective processing, but also allows uniform dose absorption throughout the stacks and across the wafers.

Sterigenics Electron Beam processing is a reliable and reproducible method for tailoring switching speeds (carrier lifetimes) of many bipolar silicon power semiconductor devices such as IGBTs, SCRs, BJTs, and GTOs. This offers significant advantages over gold or platinum doping, the conventional competitive processes, including:

The electron beam irradiation effect is fully reversible through subsequent annealing

Easily controlled uniformity and high reproducibility.

The ability to process not only wafers, but also final (“packaged”) devices.

Sterigenics can provide power semiconductor irradiation services with:

Electron Beam energies up to 12 MeV in North America, Europe and Asia

Correct dose application every time, by adhering to professional quality assurance procedures

Rapid and reliable turn times developed through experience in domestic an international logistics

Additional Information

Electron Beam Processing of Semiconductors for Precision Lifetime Control - 170.92 KB